E-007

Flexible Microrobotic System MINIMAN: Design, Actuation Principle and Control

Authors: Stephan Fahlbusch, Sergej Fatikow, Joerg Seyfried and Axel Buerkle
Affiliation: Universität Karlsruhe (TH), Institute for Process Control and Robotics, Germany

Abstract
Microsystem technology demands for advanced manipulation facilities which can assemble complex microsystems consisting of many single components (i.e. hybrid microsystems). To perform a fully automated microassembly, problems specific to the handling of micro parts have to be considered. It is necessary to introduce flexible, highly precise and fast microassembly methods. Therefore, different microrobots, which offer the possibility to carry out an assembly process under a light optical microscope with a motion resolution of up to 20 nm and speeds of up to 3 cm/s, have been developed by an interdisciplinary research group at the University of Karlsruhe. These robots are embedded into a microassembly desktop station. This paper presents the design, actuation principle and control of the flexible microrobotic system MINIMAN.

Stephan Fahlbusch
Universitaet Karlsruhe (TH), IPR
Kaiserstrasse 12, 76128 Karlsruhe
Germany
phone +49 721 608 6909
fax +49 721 608 7141
fahlbusch@ira.uka.de