J-020

A Piezo-on-Slider Type Linear Ultrasonic Motor for the Application of Positioning Stages

Authors: Chee Kian Lim, Siyuan He, I-Ming Chen, Song Huat Yeo
Affiliation: Nanyang Technological University

Abstract
In this paper, a piezo-on-slider type linear ultrasonic motor(USM) for the application of positioning stages was described. The positioning stage driven by the piezo-on-slider type linear USM has a very simple and compact structure, which consists of a commercially available linear guide and the linear USM. The piezo-on-slider type linear ultrasonic motor is just a 60mmx10mmx3.5mm rectangular plate. Quick response, no backlash, high resolution, off power self-braking and large working range are the attractive characteristics of this new type of linear positioning stages. The testing results of the stage are: moving range 220mm(variable depending on the linear guide), no-load speed 80mms-1, ratings 23mms-1/300gf, holding force 700gf, starting thrust 500gf, resolution<50nm, response time of 12ms from stationary status to constant velocity(80mms-1) with a initial mass of 260g.

LIM CHEE KIAN
P7336142G@ntu.edu.sg