1999 IEEE/ASME International Conference on Advanced Intelligent Mechatronics
September 19 - 23, 1999 - Renaissance Atlanta Hotel, Atlanta, Georgia USA

TUTORIAL

Micro/Nano-Mechatronics for Nanotechnology

Michael Falvo
University of North Carolina at Chapel Hill
Chapel Hill, NC, USA

Metin Sitti
University of Tokyo
Tokyo, Japan

Abstract
Nanotechnology which aims at the ideal miniaturization of devices and machines down to atomic and molecular sizes has been a recent hot topic as a promising high-technology for the forthcoming century. By precise control of atoms, molecules or nano scale objects, new sensors and man-made materials, tera-byte capacity memories, micro scale robots/machines, DNA-computers, quantum devices, micro scale distributed intelligence system devices with integrated sensors, actuators and communication tools, etc. would be possible within the near future. However, for new nanotechnology products, still there are many challenges to be solved, and nano manipulation is one of the important challnges at the nano world. This kind of research is still immature since the physical and chemical phenomenon at this scale has not been completely understood, intelligent automatic precision manipulation strategies are not developed, and the specific tools for the specific applications have not been defined/designed clearly. Thus, the purpose of this tutorial is to discuss these problems especially within the perspective of manipulation at the micro/nano world, and proposing possible solutions. At this point, the target is to introduce a new robotics field by integrating the micro/nano-mechatronics technology, macro-robotics technology, and phsical and chemical phenomena at the micro/nano world in order to cope with these problems. Physical phenomena at the micro/nano scale, modeling of micro/nano forces, precision manipulation control, tele-operated nano scale object manipulation, real-time visual and force sensing at the micro/nano scale world, user interface issues for micro/nano manipulation, and etc. will be the main focusing points.

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